Technologies such as VR (virtual reality), AR (augmented reality), and even MR (mixed reality), which combines the two, are evolving. These are collectively known as "xR," and Ebara is researching and developing xR technology and incorporating it into its business and operations to enhance it.
These efforts are already being seen in the training of engineers who use the "CMP Systems" used in Ebara's semiconductor manufacturing. To date, we have provided equipment training to internal and external engineers. Previously, training was conducted face-to-face using actual equipment, but by developing a new training program using xR, rather than replacing the real with digital, we are pursuing a form that makes the most of the advantages that only digital can offer.
This is an initiative that has been carried out in collaboration between the business division and the research and development division, and has also led to the in-house development of xR for training. Speaking about the behind the scenes of XR development, its merits, and future possibilities are Seiji Miura (Training Section, Service & Support Department, Equipment Division, Precision Machinery Company) and Takeshi Wakiyama (XR Technology Promotion Section, Strategic Technology Research Department, Corporate Technology, R&D, and Intellectual Property Group).
XR Training for Engineers Created by Combining Knowledge of Equipment and Elements of 3D Games
The business division and R&D department team up to provide learning that is unique to the benefits of digital technology
It began with the question of how to supplement practical skills in a remote environment
—How did the development of equipment training using XR begin?
Miura: For many years, I have been providing equipment training to customers in Japan and overseas, as well as engineers at Ebara affiliated companies. However, due to the COVID-19 pandemic, it has become difficult for people to travel, and we have had to provide training remotely rather than in the traditional face-to-face format. It wasn't too difficult to switch to remote training for classroom content that conveys information and knowledge, but the practical part - that is, training in which participants learn by actually operating actual equipment - was a problem.
We were searching for ways to supplement practical training in a remote environment when we heard about it from the xR Technology Promotion Division, where Wakiyama works.
Wakiyama: Our organization has been conducting research and development into xR. For example, we are using VR technology to build a showroom in the metaverse (a digitally created virtual space) and hold new product launches.
It is important to develop and research xR technology, but that alone will not generate profits. It is important to utilize the technology in EBARA's business, and equipment training was applicable to that. Specifically, we will use CAD data to represent real machines with VR and AR, and participants will learn how to operate the machines while simulating them. First, we made a sample, then we exchanged opinions and made repeated improvements.
Miura: The training programs are prepared according to the type and content of the equipment, and there are about 250 programs in total. We are currently creating "xR versions" of these programs with the goal of creating one per month.
The xR Technology Promotion Division has already accumulated a variety of technologies and research results, but rather than simply applying them to equipment training, I feel that they are able to use each other's knowledge and technology by listening to our opinions as trainers. I think this is an example of the business division and the research and development division literally working together.
—Are all XR training programs created in-house?
Miura: At first we outsourced the development, but now we do it in-house. The reason for this is that we wanted to make something of high quality. The key to xR training is how close you can make it to the real thing, and there is a limit to how much you can explain the feel of the operation and the movements of the equipment verbally to outsiders who are unfamiliar with the actual equipment.
In that respect, Mr. Wakiyama was originally a member of the CMP equipment control team, so he naturally has a wealth of knowledge about the actual equipment, and is able to understand it if we give him a rough idea of what it will be like. Moreover, since they are in the office, you can talk quickly when necessary. On the other hand, I have made too many requests, which has caused a lot of trouble. Wakiyama: I was in charge of CMP equipment control for about five years, and then I joined the xR Technology Promotion Division. When it began, I wanted to be involved in XR, so I applied and was transferred to my current department. I'm also grateful to my boss and the company at the time for letting me take on the challenge of what I wanted to do, but in return I feel a sense of responsibility to produce good results.
3D games as a reference for XR, which is rarely used in the manufacturing industry
—I think there is almost no precedent for attempting to reproduce a CMP tool using xR. How did you come up with the system?
XR Technology Promotion Division, Strategic Technology Research Department, Technology, Research & Development, and Intellectual Property Management Division
Wakiyama: Although xR has taken off in the gaming and entertainment worlds, its use in manufacturing and industry is still low, and there is not much information available about it. I identified the essence of the technologies and systems used in 3D games that I thought could be used and applied them to these training programs. As an engineer, I have been involved in 3D games myself, and I have worked across multiple industries. I created it by combining my own experiences with new information from the world.
Miura: I don't have any programming knowledge, so I communicate my thoughts like, "It would be great if we could do this," or "I'd like to create this kind of training using xR," and they always respond to my requests. I think I have too much faith that he can help me out, but he always helps me out.
—How have the reactions and feedback been since making the training programs?
Miura: Those who have taken this training have definitely acquired skills and knowledge, and I feel that it has had a certain degree of effect. In addition, inquiries from other departments within the company have increased. "Who made this?" I am often asked this question, so I have decided to introduce Mr. Wakiyama's name. Similar xR projects may spread to other departments as well.
—On the other hand, did you have any difficulties or concerns in pursuing the initiative?
Miura: It is true that there are a certain number of people who are critical, saying, "You won't learn anything from that," or, "Training without using actual equipment is meaningless." How to change this way of thinking is a big challenge, but it also serves to greatly increase motivation.
Of course, I don't think that training using xR will surpass the real thing. But, it is also true that XR offers different merits not available when using actual machines. For example, in the case of actual equipment, it is not possible to see the inside of the device while it is in operation. However, in a virtual space, you can make the equipment semi-transparent and see what is happening inside.
This doesn't just apply to CMP equipment, but also to pumps, for example. Until now, information on the movement of water inside was obtained from numerical data called logs. However, it may be possible to digitally simulate the movement of water based on those numbers, and then make a pump reproduced in VR semi-transparent to allow the movement of the water inside to be seen.
Wakiyama: To give an extreme example, it would be possible to make the size of the people participating in the training about 1/10 of their actual size, so that they could enter the inside of the device and check every corner of the structure. The good thing about xR is that you can do a variety of different training depending on your ideas.
Miura: Unlike actual machines, there is no limit to the number of devices, so many people can train at the same time, and you can see other people operating them from the same perspective. In addition, the programs that Wakiyama creates are sprinkled with game-like effects and effects, allowing you to experience the fun that only digital can offer.
On the other hand, it is also important to value the "tension" and "feeling of detailed work" that can only be experienced with a real machine. We hope that many people will recognize it as an option along with training using real machines.
The next goal is to assist with engineers work using XR
—Is there anything you two want to do in the future?
Wakiyama: I think it would be interesting to be able to play xR training over a network. In the gaming world, this is a genre known as MMORPGs, where many players enter the same virtual world and play a role-playing game. If this system could be successfully applied to XR training, people in Japan and around the world could enter the same space and train at the same time. This would also encourage communication. Recently, I've been researching MMORPG systems, and I hope to make it a reality someday.
Miura: Currently, we are using xR technology for training, but in the future, we hope to be able to expand this technology to "work support." For example, with MR, an engineer could put on a glasses-type device and look at the equipment and see a digital representation of the work methods and procedures. Digital technology supplements the experience and knowledge of workers, which should lead to safer and more reliable work. It may also be possible to use AI to detect abnormalities based on videos of the equipment captured by the device. This may lead to "training-less" operations, which do not require training.
Semiconductor factories operate 24 hours a day, 365 days a year, so if equipment trouble occurs, it will have a huge impact. Work assistance tools like these would enable engineers on site to perform advanced tasks and reduce problems. We have been fortunate enough to have a great team for this project, so we would like to add AI and other technologies to the technology we have built up so far and create something even more advanced.
