The EBARA Group's Strategic Table of Technological Capabilities

EBARA possesses the maintenance technology to properly maintain the functions and conditions of the various equipment and facilities that make up plants. EBARA ensures that facility functions are kept in optimal condition through inspection, diagnosis, and repair techniques when deterioration or other problems are detected.

EBARA possesses development and design technologies for central monitoring and control systems and remote monitoring device.

EBARA possesses construction management expertise to carry out projects and achieve goals by managing processes, quality, and safety, and controlling costs for new construction, expansion, and renewal of infrastructure plants.

EBARA possesses technology for electrical design of power receiving and distribution equipment and power generation facilities for infrastructure plants, as well as for designing corresponding monitoring and control systems.

EBARA possesses comprehensive management expertise to control projects from planning to implementation, design, and completion of facilities, such as drainage pumping systems for infrastructure.

EBARA possesses electrical design and control logic design technologies for power receiving and distribution equipment and power equipment in pump plants.

EBARA possesses the technology to plan and suggest facilities that can create optimal effects and value for the community, by meeting the needs of our customers, who are mainly government agencies, right from the planning stage. EBARA provides one-stop services from system proposal to design (mechanical and electrical), procurement, construction (construction management), and after-sales services to collectively solve a wide range of issues.

EBARA has developed machinery technology for connecting drive equipment such as motors and turbines with pumping machinery such as pumps, fans and compressors.

EBARA possesses technology to control the quality of plants, including all installed equipment. EBARA also possesses the technology to perform various types of inspections on the performance and functionality of a variety of products.

EBARA possesses numerical analysis technology applicable to fluid transient phenomena (water hammer, pulsation, vortex, etc.) that occur in pump plants, as well as countermeasure technologies for dealing with such phenomena.

EBARA possesses technology to design and manufacture compressors for refrigeration systems for the multi-stage economizer cycles used in ethylene production plants.

EBARA possesses technology to design and manufacture rotating machinery for pumps and compressors that utilize cryogenic liquefied hydrogen or LNG as the working fluid.

EBARA possesses technology for the shaft seals used between rotors and the casing in rotating machinery such as pumps and fans. These seals are divided largely into contact type seals (mechanical seals, gland packing, dynamic pressure seals) and non-contact type seals (liner rings, labyrinths, etc.)

EBARA possesses special coating technology for preventing corrosion, erosion, damage, and polymer adhesion of metallic materials in rotors due to high-temperature corrosive gas at petrochemical and oil refining plants.

EBARA possesses technology for the sliding bearings used to support rotors in rotating machinery such as pumps and fans, and in particular, we employ proprietary material engineering for submerged sliding bearings.

EBARA possesses technology for corrosion protection, sliding and wear, and structural strength of metallic materials.

EBARA possesses technology for manufacturing impeller parts and other components that make up pumps and compressors through additive manufacturing.

EBARA has a number of product lines, including sintering and converter blowers, as well as vehicular wind speed, tunnel, and wind tunnel fans, and we are capable of designing products in-house based on our decades of experience. We possess technologies for establishing production methods necessary for manufacturing fans, including the design, manufacturing, quality control, and maintenance of fan products.

Control technology for ensuring proper operation of various heat source equipment. Technology for selecting and combining appropriate equipment to design heat source system configurations for a variety of purposes.

Technology capable of constructing the manufacturing methods necessary to manufacture motors (winding, insulation, welding, machining)

Technology for optimally designing compressor impeller shapes through thermo-fluid analysis. Technology for designing highly efficient centrifugal chillers through thermo-fluid analysis simulations.

EBARA possesses systemware development technology for building pump monitoring systems on Cloud services on SaaS and IaaS platforms, as well as the expertise to prepare system development request requirements for external system development vendors and manage and implement system development projects.

Technology for designing structures and selecting insulation materials that satisfy insulation and water pressure resistance requirements for motors used in aquatic environments (dry types, enclosed types, canned types), connection technology for conductors and power lines in aquatic environments, and design and evaluation of elemental components (pressure regulating mechanisms, sliding bearings) that enable engineering of products.

EBARA selects materials that can handle high temperatures and high stress, and possesses technologies for welding wear-resistant materials that maintain their functionality under high dust levels. In addition, we can design components for industrial fans (airflow adjustment devices, sliding bearings) and engineer them into products.

In terms of pump systems, EBARA possesses electrical, electronic, and control technologies for optimizing the operating conditions and ease-of-use of pumps, as well as control panel design, electrical and electronic circuit design, and control logic design technologies for realizing power electronics and pump controllers for the power converters of inverters, power supplies, and other equipment.

Technology uses magnetic field analysis to determine the optimal shape design, material grade selection, layout, and number of windings for the iron cores, magnets, and conductors (primary/secondary) of motors, as well as technology uses test equipment to measure and evaluate actual equipment.

EBARA possesses technology for the sliding bearings used to support rotors in rotating machinery such as pumps and fans, and in particular, we employ proprietary material engineering for submerged sliding bearings.

EBARA possesses development technology for embedded software that performs drive control of inverters that drive pump motors, as well as development technology for embedded software that controls the operation of sensor devices that transmit the operating status of pump equipment to smartphones and other devices using wireless communications (NFC, Bluetooth, WiFi).

EBARA’s dry vacuum pumps are equipped with timing gear technology used to maintain the minute clearance between two rotors during their synchronous reverse rotation.

This is a polishing technology for semiconductor substrates in CMP systems and bevel polishing equipment. EBARA possesses polishing and planarization technology for various types of films on substrate surfaces, as well as for the substrate itself, and technology for polishing the edges (bevels) of substrates, and for removing thin films or processing them into desirable shapes.

In the CMP (Chemical Mechanical Polishing） process, planarization is achieved in the order of nanometers by using technology to precisely control the polishing pressure for each area of the substrate, while optimally combining slurry, pads, and dressers. Bevel polishing is a polishing technology that uses polishing tape to which abrasive grains are bonded, and is used to remove and polish multiple types of laminated film and silicon surfaces all at once.

This technology is used to create a vacuum in dry vacuum pump or turbomolecular pumps. A dry vacuum pump is a positive-displacement vacuum pump that does not use oil or liquid to seal the exhaust gas flow passage, thus creating a clean vacuum environment. In addition, longer pump life is achieved by optimizing the pump temperature and employing corrosion-resistant material engineering. EBARA also possesses technology which combines various vacuum equipment, piping, and vacuum pumps to produce vacuum exhaust systems by utilizing tools such as exhaust simulations.

Technology for performing electroplating in the order of micrometers on various substrates for semiconductors. Plating with substrate uniformity performance is achieved through optimal control of the flow of plating solution and the electric field in the plating cell, and optimal combination of chemical solution, anode, and membrane.

EBARA’s CMP systems are equipped with technology to control the airflow in the system in order to reduce minute particles (foreign particles) adhering to the substrate after polishing and components that cause metal contamination. EBARA also possesses technology to control the airflow in the system taking the safety of workers into consideration, such as avoiding the external diffusion of polishing particles or chemical atmosphere contained in slurry and exposure to residual chemicals during maintenance work.

EBARA possesses technology for realizing non-contact, high-speed rotation in rotating machinery using magnetic bearings. EBARA also possesses technology for realizing stable rotation by sensing the rotor position and controlling the magnetic force of electromagnets.

CMP (Chemical Mechanical Polishing) post-cleaning is a technology used to clean off slurry and polished substrate and film residue that adhered to semiconductor wafers during the CMP process. EBARA possesses drying technology to achieve Dry-in/Dry-out* concept polishing. Cleaning with chemicals or sponges, and drying by rotation or with isopropyl alcohol (IPA) can reduce defects that greatly affect semiconductor yield.

* Dry-in/Dry-out: When a dried semiconductor wafer is placed in a CMP system, the dried wafer comes out after the CMP process is complete.

The detection method is available in motor torque, optical type, and eddy current type, and EBARA possesses technology capable of detecting the CMP polishing end point by combining each method with various filters and algorithms. In wet environments where slurry flows, the residual film thickness of a substrate can be detected in the order of nanometers while the substrate is rotating.

EBARA has developed technology capable of generating ozone gas with high concentration and high flow rate through discharge, dissolving it at high concentrations in pure water, and supplying ozone water with concentration and flow rate to meet requirements.

EBARA possesses technology for abatement of perfluoro-compounds (PFCs), and combustible, acidic, toxic, and other gases by combustion, wet type process, dry type process, and fluorine fixation, gas analysis technologies, technologies for preventing powder clogging and corrosion in each part of the route from the reactor inlet to reactor interior to reactor outlet in exhaust abatement systems, and technologies for eliminating PM2.5 from treated gases.

EBARA also possesses technologies for induction canned motors, two-axis synchronous canned motors, and inverters.

EBARA has developed machining technology for cutting and drilling metal materials with tools. It is necessary to determine the optimum tool selection and cutting conditions, taking into account the material to be cut, the material shape, and dimensional tolerances. In particular, components used to create the pump vacuum must be of high machining accuracy and be suitable for mass production.

This technology achieves high productivity by maximizing the throughput of substrates that can be processed per unit time while minimizing and equalizing the transferring standby time when transferring substrates between processes in semiconductor manufacturing equipment. To achieve this, EBARA has developed software technology capable of throughput maximization simulations and scheduling substrate transferring and processing based on these simulations.

EBARA possesses design technology for electromagnetic optical systems capable of performing highly precise charged particle beam control for electron microscopes and other applications. In addition to electrode material, magnetic material, high vacuum material, part cleaning, high withstand voltage structural design, and vacuum exhaust system design technology required for charged particle beam equipment, EBARA also possesses charged particle beam control and evaluation technologies, allowing us to develop, design, test, and evaluate charged particle beam equipment.

Plasma technology is the most widely used technology in semiconductor manufacturing processes. EBARA offers customers new value through providing exhaust system solutions by utilizing various plasma technologies in dry vacuum pump and exhaust abatement systems used in the exhaust systems of manufacturing processes.

EBARA boasts an extensive lineup, including grate-type incineration system, fluidized-bed incineration system, and fluidized-bed gasification and ash melting system, and we have achieved stable incineration with a wide range of processed product properties through our own design based on many years of experience.

EBARA possesses know-how in the design and development of pyrolysis and gasification technologies such as pressurized two-stage gasification system and internally circulating fluidized-bed gasification system, which are proprietary technologies applying fluidized-bed technology.

EBARA is capable of the in-house design of internally circulating fluidized-bed boilers and waste heat boilers, and possesses technical know-how on the design, manufacture, quality control, and maintenance of boiler products, including those manufactured at our Group companies overseas.

EBARA possesses technical know-how on the design, manufacture, quality control, and maintenance of equipment such as bag filters and catalytic reaction towers, which are required for the elimination of toxic substances and to comply with emission regulations in waste incineration and power plants.

EBARA possesses technical know-how on the design, manufacture, quality control, and maintenance of conveyance equipment such as conveyors used in the handling of solid material such as waste and ash in waste incineration and power plants.

EBARA possesses technologies for designing, developing, and operating fluidized-bed reactors, such as fluidized-bed incineration and fluidized-bed gasification systems. By forming a fluidized bed by supplying fluidized gas such as air from the bottom of fluidized media particles packed in the reactor and freely controlling the behavior of the fluidized media particles in the bed using our proprietary internal rotation and circulation technology, appropriate reaction of the processed material, separation of foreign matter, and efficient heat recovery and resource recovery functions are realized.

EBARA has developed various technologies for measurement, diagnosis, and evaluation for the purpose of diagnosing wear, deterioration, and failure of various equipment and elements used in waste incineration and power plants. We are also working on the development of methods for predicting abnormalities and failures in conveyance equipment and rotating equipment using IoT, sensing, image recognition, and machine learning technologies.

In addition to analyzing the chemical composition and physical properties of solid material such as incinerated ash, cross-sectional analysis and microstructural analysis near the corrosion interface of metal materials, EBARA also has know-how in measuring and evaluating microdose toxic agents such as dioxins contained in incinerator exhaust gas.

This technology is used to select the most suitable materials for the various equipment and elements used in waste incineration and power plants. In particular, EBARA possesses extensive knowledge and know‐how in selecting, evaluating, diagnosing, and developing new materials for the high-temperature corrosion environments unique to waste incinerators and biomass boilers.

In addition to fluid analysis and reaction analysis applied to the combustion reaction and heat transfer phenomenon that occurs inside incinerators and boilers, EBARA possesses a variety of numerical analysis technologies, including those for analysis of flow fields containing particles such as fluidized bed, diffusion analysis of stack exhaust gas, and strength analysis of waste incineration and power plant components.

In order to realize high reliability and long life for pumps and compressor products, EBARA has developed technology to analize and evaluate strength and deformation , taking into account actual harsh operating condition.

EBARA possesses technology to develop and design the aerodynamic and hydraulic components of our turbomachinery products such as pumps, compressors, fans, and steam turbines by utilizing advanced CAE technology such as flow analysis and optimization technology.

This group of technologies maximizes development throughput by identifying simulation processes necessary for various product development needs, and includes technologies for automating and streamlining Computer Aided Engineering (CAE) from 3D modeling to flow analysis, and vibration and structure analysis.

Infrastructure

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• Related Products(Flow Optimization)
• Related Products(Shaft/Bearing/Seal)

Energy

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Building and industrial

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EBARA possesses general hardware modeling, analysis, and design technologies for electromagnetic devices and actuators, as well as control design technologies for increasing the speed, precision, and disturbance resistance of equipment, in order to support the development and design of mechatronics products.

EBARA possesses the data collection, processing, aggregation, visualization, analysis, model creation, and AI technologies necessary to extract new value from data and solve problems for which there is still no known theoretical or formalized knowledge.

For example, we were the first in the industry to commercialize “waste identification AI” that uses deep learning to identify the types and properties of waste at waste incineration and power generation plants.  Through collaboration with external partners, EBARA is actively developing various AI solutions that contribute to advancement and labor savings in the design, construction, operation, and maintenance of waste incineration and power plants.

Environment

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• Related Products

EOL and Production

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Based on technology for analyzing the composition and elemental state of solid surfaces,  EBARA has developed technologies for evaluating the surface condition and physical properties in practical application environments such as those in chemical solution or high temperatures.

EBARA possesses welding technology that requires high quality, such as that used in the welding of extremely thick plates with thickness greater than 100 mm (compressor bodies, etc.), and in the welding of highly corrosion-resistant materials such as duplex stainless steel for seawater pumps.

These welding technologies are subject to quality control in accordance with welding standards such as ASME. EBARA is also working on welding automation using robots, welding cameras, and sensors.

Surface treatment technologies such as thermal spraying and laser cladding are used to give corrosion resistance and wear resistance to pump impellers and shafts. We have also started using these technologies for parts that require heat resistance inside incinerators.  These techniques are also used to restore the shape of damaged parts.

EBARA possesses metal 3D printing technology (for material-specific beam conditions and support design) and deformation prediction analysis technology. These technologies contribute to rapid supply of parts, integration of multiple parts, topology optimization for design-oriented engineering, and more efficient trial production and testing. In the field of manufacturing, we are also using 3D printers to produce sand molds for casting and lost resin patterns for precision casting.

EBARA possesses the technology to create 3D data by performing 3D scans and dimensional measurement of actual objects for repair and replacement of parts that are old and have no drawings or other companies’ products. This 3D data allows us to optimize designs and quickly produce parts using additive manufacturing technology.

To confirm the soundness of our products, EBARA uses non destructive examination (NDE) techniques such as penetrant testing (PT), magnetic particle testing (MT), ultrasonic testing (UT), radiographic testing (RT), and computed tomography (CT). We are also working to digitize NDE techniques.

In addition to thickness measuring, self-propelling robots capable of automatically measuring multiple wall thickness points by running inside the heat transfer pipes of waste incineration and power plant boilers, EBARA also possesses technologies for developing robots that contribute to advancement and labor savings in the maintenance and inspection of waste incineration and power plants, as well as technology and know-how for applying these robots to business. EBARA actively promotes the use of robots in manufacturing processes. We also promote their use in automated vacuum pump assembly lines, as well as in welding, coating, and grinding processes.

EBARA uses IoT to collect operating information from machine tools and factory utility equipment in order to monitor their operating status. These data are used to determine equipment times and operating rates, as well as to detect abnormalities and carry out preventative maintenance.

EBARA applies virtual reality (VR), augmented reality (AR), and mixed reality (MR) technologies, as well as technologies that utilize high-speed communication, the cloud, and AI for these xR technologies to enhance and improve the efficiency of various internal operations. As some specific examples, we are using xR technology in design review tasks, various types of virtual training, and also to support disabled people in their work.

EBARA possesses basic technologies and application techniques for corrosion protection, surface sliding and wear, and structural strength of metallic materials, and these contribute to the selection of EBARA product materials used in severe environments, the prediction of product life, and the improvement of product reliability.

EBARA possesses state-of-the-art analysis technologies that improve product development, design, and reliability. For example, internal flow analysis in fluid machinery and semiconductor manufacturing equipment enables the development and design of high-performance products, cavitation analysis technology allows predictive maintenance to be performed for damage and noise, and other technologies, such as various fluid measurement techniques and fluid visualization technologies that use high-speed cameras, PIV, and oil film methods are all applied to our products.

In order to improve the performance and reliability of rotating machinery such as pumps and fans, and of pump stations, EBARA has developed systems and proprietary technology for applying numerical analysis such as oscillatory structural mechanics and thermal hydraulics.

EBARA also supports product development in various industries by leveraging a wide range of analytical technologies such as thermal fluid analysis, structural analysis, vibro-acoustic analysis, mass transfer analysis, coupled analysis, cavitation analysis and other types of multiphase flow analysis, atomic-scale analysis, as well as large-scale computing technologies using high-performance computers with several thousand cores, AI, and data science technologies such as data assimilation.

EBARA possesses technology for the bearings used to support rotors in rotating machinery such as pumps and fans.In particular, EBARA has developed proprietary technology for submerged sliding bearings and hydrodynamic bearings.

EBARA possesses advanced technologies for vibration reduction, vibration prediction and optimization, noise reduction, sound quality (listening comfort) control, measurement and analysis. These technologies contribute to improving the reliability of EBARA’s rotating machinery such as pumps, fans, and other products.
In particular, EBARA possesses technologies to ensure proper operating conditions by controlling and reducing the effects of vibration and noise on rotating machinery.These technologies also include failure diagnosis (remote monitoring systems) and various types of soundproofing and anti-vibration devices.

EBARA possesses technical knowledge on material surface treatment (chemical modification, coating, silane coupling treatment, plasma treatment, polymer brush treatment, micro-fabrication, etc.) to contribute to improvements in product performance, such as corrosion prevention and sliding, adhesion and bonding, and wettability control.

In order to contribute to the development of products utilizing heat transfer such as chillers, cooling towers, and geothermal power generation,  EBARA has technologies for measuring and estimating the amount of heat transfer from applicable objects to the environment.

EBARA is actively working to digitize casting processes. Based on 3D models created by our design department, EBARA is developing high-quality casting manufacturing technology and applying it to our products by digitizing a series of processes, including preparation of casting plans using 3D-CAD, preliminary evaluation of quality with casting simulations, cast manufacture using sand mold 3D printers, and post-casting quality inspections using 3D scanners.

EBARA has developed technologies for machining hydro and aero parts such as impellers using 5-axis machining centers, as well as those for machining large parts and vacuum pump parts that require high machining accuracy.

EBARA uses various measuring instruments to determine machining conditions such as cutting power, and to observe tool cutting edges. We also use machining simulation technology to optimize machining conditions.

EBARA possesses a variety of technologies necessary for the machining of press products such as press pumps. By using molding simulation techniques, we can predict springback (a phenomenon in which a mold attempts to return to its original shape after pressing) and design molds to accommodate this phenomenon, thereby eliminating the need to modify molds afterwards. EBARA also possesses resistance welding and laser welding technologies for joining pressed parts.

EBARA possesses the assembly technology necessary to ensure product performance, such as centering for large products such as large-scale pumps, compressors and turbines, and gap adjustment for vacuum pump products.

A manufacturing execution system (MES) is used to monitor progress on the production floor and issue instructions to workers.

Based on the Toyota production system concept, EBARA conducts work analysis and flow analysis using industrial engineering (IE) to improve production lines in order to ensure efficient production at plants. We are also working to improve layouts using production simulators.