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Model G-WS

Optimal for low-cost treatment of water-soluble gas, space-saving, wet-type exhaust abatement system

  • Wet-type exhaust abatement system
  • Multiple gas batch processing
  • Countermeasures against by-products
  • Long-term maintenance interval
  • Low running costs
  • Low initial costs
  • Possible to deal with CE marking/SEMI-S2/NRTL
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Features and Benefits
  • Is a wet-type exhaust abatement system that can be installed and operated with a low cost. It requires no fuel and a long-term maintenance cycle is realized based on Ebara's unique countermeasures against by-products that have been cultivated in combustion-type exhaust abatement systems for more than ten years. High uptime contributes to stable operation and reduction of maintenance costs and labor.
  • In addition, the maintenance space is in the front of the device only. A flexible layout is possible even for limited sub-fab space.
  • Gas to be treated: Water-soluble gas, such as NH3, DCS, TiCl4, WF6, HF, and HCl, which can be treated at room temperature

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