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model GT

Dry abatement system for treatment of hazardous substances such as arsenic and phosphorous without need for water scrubbing

  • Best suited for research facilities
  • Adsorbs specific chemical substances
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Features and Benefits
  • The most suitable adsorbent can be selected for each target process gas, making it suitable for a wide range of applications.

Specifications

Type Type Unit GTE-3-0 GTE-0-2 GTC-1-0 GTC-2-0 GTC-6-0 GTC-0-1
Abatement method Abatement method Dry Dry Dry Dry Dry Dry
Max. inflow gas volume Max. inflow gas volume L/min 100 80 100 100 100 100
Dimension Single Dimension Single W x D x H mm 600x600x2,000 900x600x2,000 600x600x2,000 600x600x2,000 600x600x2,000 600x600x2,000
Dimension Dual Dimension Dual W x D x H mm 900x600x2,000 - 900x600x2,000 900x600x2,000 900x600x2,000 900x600x2,000
Gases (e.g.) Gases (e.g.) HBr, Cl2, BCl3, F2, SiF4, HF, COF2, C5F8, C4F6, etc. NF3, N2O, NO, NO2, SiF4, HF, F2, etc. SiH4, PH3, AsH3, TMS, etc. NH3, SiH2Cl2, SiCl4, etc. TEOS, TMB, TME, O3, etc. ClF3, HF, F2, HCl, etc.

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