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model GCR

Highly efficient, energy-saving catalysis-type exhaust abatement system

  • Catalysis-type exhaust abatement system
  • Low power consumption
  • Highly efficient abatement of PFC gases
  • No fuel required
  • Low maintenance costs
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Features and Benefits
  • Model GCR is a catalysis-type exhaust abatement system that efficiently decomposes and removes gases, including PFC gases such as CF4 used for etching oxide semiconductor films, at low running costs.

Specifications

Type Type Unit GCR120* GCR250
Abatement method Abatement method catalytic + wet catalytic + wet
Reactor life detector Reactor life detector PFC detector PFC detector
Max. inflow gas volume Max. inflow gas volume L/min 120 250
Dimensions Dimensions W x D x H mm 1,200×600×1,800mm 1,400×700×1,850mm
Gases (e.g.) Gases (e.g.) CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc. CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc.

Products in the same category

model FDS

Dry exhaust abatement system for highly efficient and safe treatment of PFC gases with no need for water scrubbing
model TND

Combustion-type exhaust abatement system with low NOx emissions and abundant reaction byproduct measures for reduced maintenance costs.