Skip to main content
Global
Enter keyword
Inquiry
Global

model EV-S

Dry vacuum pump with low power consumption and small footprint

  • Low power consumption
  • Compact and light weight
  • Corrosion resistant material options
  • N2 purge model option available
  • Identical pumping performance regardless of frequency (50/60 Hz)
  • Oil-free
  • CE marking/SEMI-S2/NRTL available
Contact
Features and Benefits
  • With EBARA’s unique rotor design and idling function, the Model EV-S range achieves world-class energy efficiency and a small footprint. Helps to reduce running costs. With enhanced corrosion resistance options available, this model offers a wide range of applications from light-load processes such as load-lock and SEM to corrosive processes.

Specifications

Type Type Unit EV-S20 EV-S20P/N EV-S30 EV-S30P EV-S50 EV-S50P/N EV-S100 EV-S100P/N EV-S200 EV-S200P/N
Cooling water Flow rate L/min 1.5~3.0 1.5~3.0 1.5~3.0 1.5~3.0 2.0~3.0 2.0~3.0 2.0~3.0 2.0~3.0 2.0~3.0 2.0~3.0
Temperature ℃ Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30
Power supply Power capacity kVA 3.2 3.2 3.6 3.6 4.8 4.8 6.4 6.4 6.8 6.8
Pumping Speed Pumping Speed L/min 1670 1670 3300 3300 5000 5000 10000 10000 20000 20000
Ultimate Pressure Ultimate Pressure Pa 3 5 0.5 1 0.5 0.5 0.5 0.5 0.5 0.5
Connection Inlet NW50 NW50 NW50 NW50 NW50 NW50 NW80 NW80 NW100 NW100
Outlet NW25 NW25 NW25 NW25 NW25 NW25 NW25 NW25 NW40 NW40
Approx. Power at Ultimate Pressure Approx. Power at Ultimate Pressure kW 0.4 0.4 0.4 0.4 0.55 0.55 0.65 0.65 0.75 0.75
N2 Flow rate Pa•m3/s - 17～20 (2.4) - 17～20 (2.4) 17～20 (2.4) 17～20 (2.4) 17～20 (2.4)
Power supply Phase/Volt/Freq. 200V Models 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz 3-phase/200-220V,50/60Hz
400V Models 3-phase/380-440V,50/60Hz 3-phase/380-440V,50/60Hz - - 3-phase/380-440V,50/60Hz 3-phase/380-440V,50/60Hz 3-phase/380-440V,50/60Hz 3-phase/380-440V,50/60Hz 3-phase/380-440V,50/60Hz 3-phase/380-440V,50/60Hz
Weight Weight kg 60 60 90 90 100 100 120 120 170 170
  • *Specifications are examples only. They may vary depending on the model, so please inquire for details.
  • *Contact us for details.

Products in the same category

model ESA

Dry vacuum pump suitable for pumping light gases such as hydrogen. Ideal design for fast pump-down requirements in large volume chambers.
model EV-SA

Dry vacuum pump for exhaust speeds of up to 5,000 L/m. Compact, air-cooled model.
Integrated dry vacuum pump/gas abatement systems

Enables optimization of chamber exhaust/exhaust gas abatement process, reduces integration and management costs