model EV-M

Features and Benefits

• With EBARA’s unique heat-resistance technology, the Model EV-M range is designed for high-load applications where large volumes of reaction byproducts are generated in semiconductor, liquid crystal, and solar cell manufacturing processes. With its outstanding power consumption performance, the Model EV-M range has mastered the balance between resistance to high-load applications and energy efficiency. Robust anti-corrosion materials are employed as standard. A large-capacity model offering a pumping rate of 110,000 L/min is also available. The extensive product line-up caters to a wide range of high-load applications to match process conditions.