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model EST

Dry vacuum pump suitable for handling reaction byproducts and for fast pump-down requirements in large-volume chambers

  • High-temperature operation control
  • High exhaust speeds
  • Large pumping volumes
  • Corrosion resistant materials employed as standard
  • Enhanced corrosion resistant options
  • High-load applications
  • Identical pumping performance regardless of frequency (50/60 Hz)
  • Oil-free
  • CE marking/SEMI-S2/NRTL available
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Features and Benefits
  • The Model EST range uses a screw-type rotor and is equipped with a high-temperature operation function to maintain gas in the pump at high temperatures. Best suited for applications where reaction byproducts are generated, such as CVD. With corrosion resistant materials employed as standard, this model achieves high exhaust speeds and large pumping volumes and contributes to process efficiency by curbing downtime.

Specifications

Type Type Unit EST10N EST25N EST100WN EST200WN EST300WN EST500WN EST800WN
Cooling water Flow rate L/min 5~8 5~8 5~8 5~8 5~8 5~8 5~8
Temperature ℃ Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30
Power supply Power capacity kVA 4.6 7.3 8.2 8.5 12.7 15.1 16
Pumping Speed Pumping Speed L/min 1000 2500 10000 20000 30000 50000 80000
Ultimate Pressure Ultimate Pressure Pa 2.7 0.4 0.4 0.4 0.4 0.4 0.5
Connection Inlet NW40 NW40 NW50 NW100 NW100 ISO160 ISO200
Outlet NW40 NW40 NW40 NW40 NW40 NW40 NW40
Approx. Power at Ultimate Pressure Approx. Power at Ultimate Pressure kW 2.3 3 3.2 3.2 4.5 4.6 4.6
N2 Flow rate Pa•m3/s 13~18 13~18 24~29 24~29 28~31 28~31 28~31
Power supply Phase/Volt/Freq. 200V Models 3-phase/200-220V,50/60Hz 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3相/203-phase/200V/50Hz
3-phase/200-220V/60Hz0V/50Hz
3相/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz
400V Models 3-phase/380-440V,50/60Hz 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 -
Weight Weight kg 260 300 380 430 500 550 840

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