model ESA
Dry vacuum pump suitable for pumping light gases such as hydrogen. Ideal design for fast pump-down requirements in large volume chambers.
Features and Benefits
- The Model ESA product lineup includes models with pumping speeds ranging from 1,400 to 10,000 L/min, suited for pumping light gases such as hydrogen, and models with exhaust speeds from 20,000 to 80,000 L/min, for fast pumping in large volume chambers. The light-gas application models with pumping speeds of 10,000 L/min and below offer a small footprint and enhanced corrosion resistance options, which are ideal for large-volume light-gas pumping applications such as MO-CVD. The larger models achieve quiet, low-vibration operation, with optional exhaust configurations for organic solvent applications. They are ideal for LCD spatter devices, vacuum drying processes, and large load-lock applications.
Specifications
| Type | Type | Unit | ESA15-D | ESA25-D | ESA25XW | ESA70W(-D) | ESA70WN(-D) | ESA80W-HDF | ESA80WN-HDF | ESA100W | ESA100WN | ESA200W | ESA300W | ESA500W | ESA700W |
| Cooling water | Flow rate | L/min | 3.5~8 | 3.5~8 | 7~16 | 3.5~8 | 3.5~8 | 3.5~8 | 3.5~8 | 3.5~8 | 3.5~8 | 3.5~8 | 6~9 | 6~9 | 6~9 |
| Temperature | ℃ | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | |
| Power supply | Rated voltage 50/60 Hz | Single-phase 200-240V3-phase 200-240V | |||||||||||||
| Permissible voltage fluctuation | ±10% | ||||||||||||||
| Power capacity | kVA | 6.4 | 6.4 | 12.8 | 10.3 | 10.3 | 12.6 | 12.6 | 12.6 | 12.6 | 12 | 23.7 | 41.3 | 46.5 | |
| Pumping Speed | Pumping Speed | L/min | 1,400 (50Hz)1,700 (60Hz) | 2,500 (50Hz)3,000 (60Hz) | 5,000 (50Hz)6,000 (60Hz) | 7,000 (50Hz)8,400 (60Hz) | 7,000 (50Hz)8,400 (60Hz) | 8,400 (50Hz/60Hz) | 8,400 (50Hz/60Hz) | 10,000 (50Hz/60Hz) | 10,000 (50Hz/60Hz) | 20,000 (50Hz/60Hz) | 28,000 (50Hz)30,000 (60Hz) | 47,000 (50Hz)50,000 (60Hz) | 80,000 (50Hz/60Hz) |
| Ultimate Pressure | Ultimate Pressure | Pa | 400 (50Hz)270 (60Hz) | 5.3 (50Hz)4.0 (60Hz) | 5.3 (50Hz)4.0 (60Hz) | 0.27 (50Hz)0.13 (60Hz) | 0.4 (50Hz)0.27 (60Hz) | 0.13 | 0.27 | 0.13 | 0.27 | 0.53 | 0.53 | 0.53 | 0.5 |
| Connection | Inlet | NW40 | NW50 | ISO80 | NW50 | NW50 | NW50 | NW50 | NW50 | NW50 | NW80 | ISO100 | ISO160 | ISO160 | |
| Outlet | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | NW50 | ||
| Approx. Power at Ultimate Pressure | Approx. Power at Ultimate Pressure | kW | 2.9 (50Hz)3.2 (60Hz) | 2.6 (50Hz)2.9 (60Hz) | 5.2 (50Hz)5.8 (60Hz) | 3.6 (50Hz)4.0 (60Hz) | 3.6 (50Hz)4.0 (60Hz) | 4.2 | 4.2 | 4.9 | 4.9 | 3.2 (50Hz)3.4 (60Hz) | 6.6 (50Hz)7.3 (60Hz) | 5.1 (50Hz)6.7 (60Hz) | 7.4 |
| N2 | Flow rate | Pa•m3/s | 14~17 (4.6) | 17~20 (3.8) | 34~40 | 24~27 (4.7) | 24~27 (4.7) | 54~57 | 54~57 | 54~57 | 54~45 | 17~20 (3.8) | 7.5~10.5 | 8.5~11 | 8.5~11 |
| Power supply Phase/Volt/Freq. | 200V Models | 3-phase/200V/50Hz3-phase/200-220V/60Hz | 3-phase/200V/50Hz3-phase/200-220V/60Hz | 3-phase/200V/50Hz3-phase/200-220V/60Hz | 3-phase/200V/50Hz3-phase/200-220V/60Hz | 3-phase/200V/50Hz3-phase/200-220V/60Hz | 3-phase/200V/50Hz3-phase/200-220V/60Hz | 3-phase/200V/50Hz3-phase/200-220V/60Hz | 3-phase/200V/50Hz3-phase/200-220V/60Hz | 3-phase/200V/50Hz3-phase/200-220V/60Hz | 3-phase/200V/50Hz3-phase/200-220V/60Hz | 3-phase/200V/50Hz3-phase/200-220V/60Hz | 3-phase/200V/50Hz3-phase/200-220V/60Hz | 3-phase/200V/50Hz3-phase/200-220V/60Hz | |
| 400V Models | 3-phase/380-400V/50Hz3-phase/380-440V/60Hz | 3-phase/380-400V/50Hz3-phase/380-440V/60Hz | 3-phase/380-400V/50Hz3-phase/380-440V/60Hz | 3-phase/200V/50Hz3-phase/200-220V/60Hz | 3-phase/380-400V/50Hz3-phase/380-440V/60Hz | 3-phase/380-400V/50Hz3-phase/380-440V/60Hz | 3-phase/380-400V/50Hz3-phase/380-440V/60Hz | 3-phase/380-400V/50Hz3-phase/380-440V/60Hz | 3-phase/380-400V/50Hz3-phase/380-440V/60Hz | 3-phase/380-400V/50Hz3-phase/380-440V/60Hz | 3-phase/380-400V/50Hz3-phase/380-440V/60Hz | 3-phase/380-400V/50Hz3-phase/380-440V/60Hz | - | ||
| 460V Models | 3-phase/440V/50Hz3-phase/440-480V/60Hz | 3-phase/380-400V/50Hz3-phase/380-440V/60Hz | 3-phase/440V/50Hz3-phase/440-480V/60Hz | ||||||||||||
| Weight | Weight | kg | 240 | 240 | 480 | 380 | 380 | 400 | 400 | 400 | 400 | 410 | 700 | 750 | 1200 |
