Semiconductor technology powers a wide variety of devices that are indispensable in our daily lives, including computers, smartphones, home appliances, vehicles, and medical equipment. The manufacture of semiconductors requires a vast number of processes, including etching, cleaning, thin film formation, ion implantation, and flattening. Ebara's cutting-edge technology supports semiconductor manufacturing sites, which are becoming more miniaturized and more efficient every day.
Semiconductor manufacturing
Used in various processes in the manufacture of semiconductor
Details of Process
Examples of use in processes
- Dry vacuum pump: Vacuum processing equipment used in semiconductor pre- and post-processing, such as CVD, etching, and ion implantation.
- Exhaust gas treatment equipment: Treatment of harmful gases generated in the semiconductor manufacturing process.
- Ozonized water production equipment: Wafer cleaning, resist removal.
- CMP equipment: Planarization processing.
