Different types of analyzers are used in a variety of fields, including industrial products, chemicals, medical/biotechnology, and basic science applications. A clean vacuum environment is essential for the realization of highly sensitive, accurate analysis. EBARA’s dry vacuum pumps, with their compact, quiet, and clean exhaust design, make it possible to build extremely clean vacuum environments, even in research laboratories and testing labs, and can be used in a variety of analytical equipment.
Analysis

Mass spectrometer, electronic microscope, spectroscope, classifier, etc.
Details of Process
Examples of use in processes
- Dry Vacuum Pump