In recent years, many countries around the world have declared their intention to achieve "carbon neutrality," aiming to reduce net greenhouse gas emissions to zero overall, and Japan has also set specific numerical targets. Carbon neutrality is also an important keyword for the semiconductor industry, and environmentally friendly and sustainable semiconductor manufacturing technology is becoming increasingly important. As one of these companies, the EBARA Group is working to achieve carbon neutrality through its business activities, and is taking various approaches to develop environmentally friendly products.
We are working to make our dry vacuum pumps, the main product of our component business, smaller, lighter, and less power-consuming, and we are reducing the environmental impact of our exhaust gas treatment equipment by reducing fuel consumption, eliminating fossil fuels, and improving greenhouse gas decomposition performance. Additionally, we are investigating the efficient use of resources by building a hydrogen reuse system for the EUV exhaust system. In the CMP business, we are working to reduce power consumption and utility usage, and in other businesses, we are working to develop and expand sales of new wafer plating equipment that uses significantly less pure water, and wafer bevel polishing equipment that basically does not require chemical solutions or process gases.
We are also actively adopting renewable energy in our own factories, and at the Fujisawa facility, we have installed solar panels on the factory roof in an effort to reduce the environmental impact. The EBARA Group will continue to accelerate its efforts to achieve carbon neutrality, aiming to achieve the Sustainable Development Goals (SDGs).
