Semiconductors are indispensable for the evolution of technology, such as the popular recent developments of generative AI, autonomous driving, and smartphones. The semiconductor manufacturing process is said to involve several hundred steps, many of which use a variety of special gases. These gases are discharged outside the plant after being treated appropriately and in an environmentally friendly manner in accordance with the laws and regulations of each country, and exhaust gas treatment equipment is used as part of this exhaust process. In recent years, environmental awareness has increased throughout the semiconductor industry, and demand for exhaust gas treatment equipment is expected to continue to grow.
Contributing to a sustainable society through exhaust abatement technology
Exhaust abatement systems supporting both emerging industries and the global environment
The exhaust gas treatment equipment manufactured by the Precision Machinery Company has a wide range of applications, including reducing the global warming effects of PFCs, which have a high global warming effect, safely treating flammable gases, and detoxifying gases that contain highly toxic substances that are harmful to the human body. To accommodate these diverse applications, we offer a product lineup that can treat a wide variety of gases using many treatment methods, including combustion, wet, dry, and catalytic. In addition, because it is a point-of-use type used near the source, long-distance piping to large-scale treatment equipment is not required. It can be introduced with low initial costs, and its compact design makes it easy to install and relocate, making it easy to use not only for mass production equipment but also for experimental purposes.
