What do you imagine when you hear the word "vacuum"? You might imagine "nothingness and emptiness" like outer space. Products utilizing vacuum technology exist in a variety of fields, from electronic devices such as smartphones and PCs that are now indispensable to our daily lives, to vacuum flasks used in everyday life, to particle accelerators used in cutting-edge physics experiments. Of these, vacuum is particularly significant in the manufacture of semiconductors.
Dry vacuum pumps utilizing vacuum technology to create a clean environment
"Dry Vacuum Pumps" create the vacuum space essential for semiconductor manufacturing.
In the process of processing wafers, which are used as semiconductor substrates, a vacuum pump is used to remove air from the processing space, called a chamber, in order to prevent impurities (gas molecules, etc.) from entering. In this case, what is needed is a dry vacuum pump, which is handled by the Precision Machinery Company. It has the function of removing gas molecules from the space, and its structure does not use oil in the gas contact area, so there is no worry about contamination due to backflow or diffusion of water or oil, and a clean vacuum can be obtained. MHI began selling dry vacuum pumps in 1986 and currently holds the second largest share of the global market. With more than 50 service locations around the world and a global, reliable support system, we are supported by many companies around the world.
