EBARA Corporation (hereinafter "EBARA") is pleased to announce the completion of a new overhaul factory (hereinafter "Main Factory") for dry vacuum pumps, a flagship product of the Precision Machinery Company. With the completion of this factory, our company now has five dry vacuum pump overhaul factories in Japan.
1. Background
Our company entered the semiconductor-related field in the 1980s, applying our expertise in fluid technology and rotating machinery technology. The semiconductor market is predicted to reach 1 trillion dollars (approximately 150 trillion yen) in 2030, and demand for dry vacuum pumps, which are indispensable at semiconductor manufacturing sites, is also expanding. In order to expand our after-sales service, we started construction of this factory in December 2023, and the building has now been completed. It is scheduled to begin operation in April 2025.
2. Overview
In the process of processing wafers that will become semiconductor substrates, air is removed from the processing space called the chamber using a vacuum pump to create as high a vacuum as possible to prevent the introduction of impurities (such as gas molecules). The "dry vacuum pumps" we manufacture are designed without using oil in the gas-contacting parts, so there is no need to worry about contamination caused by backflow or diffusion of water or oil, and a clean vacuum can be obtained. At this factory, we check the condition of the dry vacuum pumps returned from the customer's factory, disassemble, clean, repair, replace parts, assemble, test, etc., to make them perform as well as new ones, and then deliver them back to the customer's factory.
3. Details of the new overhaul factory