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Combustion Exhaust Gas Abatement System Model LPCMN


Combustion type exhaust gas treatment equipment LPCMN type Combustion type exhaust gas treatment equipment LPCMN type

EBARA Corporation (hereinafter referred to as EBARA) will begin sales of the LPCMN-type combustion-type exhaust gas abatement systems, which detoxifies process gas in semiconductor manufacturing, in January 2025.


1. Background

The semiconductor manufacturing process uses a variety of new special material gases. In addition to safely detoxifying them, it is also required to reduce the generation of reactive by-products generated in the process, extend the continuous operating time of the exhaust gas abatement systems, and prevent the production line from being shut down.
To meet these needs, EBARA has developed a new LPCMN exhaust gas abatement systems with improved processing performance and durability than the conventional TND system.


2. Features

This product has the following four main features.

① Suppression of by-product adhesion and NOx/COx Compatibility of emission reduction
Achieved DRE value of 95% or higher for persistent gas such as CF4, which is equivalent to or higher than that of conventional products. The newly developed two-stage combustion burner minimizes by-product adhesion in the gas treatment reaction section and reduces NOx/COx emissions.

② Miniaturization of the product saves space
The size of the chassis has been reduced by approximately 50% compared to the conventional model. By miniaturizing the product, it is possible to effectively utilize the upper space created.

③ Hydrogen Fuel Specification Lineup
Hydrogen Fuel in addition to fossil fuels has been added to the lineup.

④ Maximum air volume 600L/min
It is a compact design, but it has the same maximum air volume as the conventional TND type. 3. Specifications

 

3. Specification

Formatmodel LPCMN
Max connection inlets4 pcs. (6 pcs. are scheduled to be sold in 2025)
Max gas inflow 600L/min (Large flow specifications will be released soon)
External dimensions W x D x H (mm)1200 x 700 x 990
FuelHydrogen./ City gas / Propane
Supported processALD / PE-CVD / LP-CVD / ETCHING

 

4. Future development

We will exhibit the actual machine and panel of this product at SEMICON Japan 2024 which will be held at Tokyo Big Sight from December 11, 2024.
Going forward, we will continue to address challenges with technologies that meet customers' expectations. We will contribute to the further development of the diversifying semiconductor industry and the "creation of an evolving and prosperous lifestyle" set forth in our long-term vision "E-Vision 2030."

The EBARA Group aims to achieve the Sustainable Development Goals (SDGs) and further enhance its corporate value by addressing key ESG issues based on its long-term vision and medium-term management plan.


*The “○○○ type” displayed in the text is our model symbol.

[Contact for inquiries on this matter]
Precision Machinery Company Exhibition Contact: pmc_info@ebara.com opens in a new tab
Inquiries on interviews: ec-pr@ebara.comopens in a new tab