EBARA CORPORATION (hereinafter, EBARA) is pleased to announce the establishment of a new overhaul plant for dry vacuum pumps, the flagship product of the precision and electronics company.
New Dry Vacuum Pump Tohoku Overhaul Plant Established

1. Background and Objectives
The semiconductor market is expected to grow further as demand in the automotive, energy and medical sectors expands, as well as IoT and DX advances. The demand for dry vacuum pumps, an essential component of semiconductor manufacturing, is also growing, and a new factory will be built to overhaul this product to expand after-sales service.
2. Plan Summary
Location: | Hobara-cho, Date-shi, Fukushima (in Hobara Industrial Park) |
Facility Contents: | Dry Vacuum Pump Overhaul Plant |
Building Area: | Approximate 3,000 sqm |
Site Area: | Approximate 10,000 sqm |
Time of Construction: | Expected to Begin in June 2023 |
Completion Time: | Expected July 2024 |
Investment Amount: | Non-disclosure |
3. Future developments
By establishing a new Tohoku Plant, we will support stable operation in our customers' production activities. We will continue to contribute to the further development of the diversified and accelerated semiconductor industry and to the "Evolving and Flourishing Lifestyle" set forth in our long-term vision "E-Vision 2030."
EBARA Group aims to achieve the Sustainable Development Goals (SDGs) and further enhance its corporate value by addressing key ESG issues based on its long-term vision and medium-term management plan.