Ebara Corporation (hereinafter referred to as "Ebara") Precision Machinery Company has achieved shipments of 200,000 units of its dry vacuum pumps, which have been on the market for 36 years, in July 2022.
Dry vacuum pump Fujisawa factory reaches cumulative shipment of 200,000 units
2-1 Overview
Our dry vacuum pumps are non-contact vacuum pumps that do not use oil or liquids for sealing. By applying Ebara's proprietary, superior rotating machinery technology, it is possible to create a constant high vacuum and clean environment that is essential for the semiconductor manufacturing process. The non-contact seal structure and few deteriorating parts enable a long maintenance cycle.
In 2021, we announced the EV-X dry vacuum pump for medium-load processes in semiconductor manufacturing. Compared to our current models, this model consumes 25 to 50% less power and at the same time improves process gas exhaust performance. It demonstrates its strengths in the HARC (deep hole) process*1 required for 3D NAND of cutting-edge memory devices, the interlayer insulating film etching process, the ashing process*2 which requires high-flow gas processing, and the epitaxial growth*3 process.
Our dry vacuum pump series with innovative technology provides vacuum solutions not only for cutting-edge semiconductor manufacturing processes, but also for a wide range of industries such as analytical equipment, drying equipment, LEDs, and lithium-ion batteries. In addition, we strive to make all our products more energy efficient and compact, helping to reduce our customers' utility costs while also contributing to carbon neutrality.
3. Future Plans
In 2020, we completed construction of Building V7, an automated factory for producing dry vacuum pumps, within our Fujisawa facility. The new factory will introduce the latest technology, including automation, and will provide one-stop production from machining to assembly and shipping testing, and will continue to work to further improve productivity.
We would like to express our gratitude to our many customers who have supported us and to all of our partner companies who have supported us in achieving the cumulative shipment of 200,000 dry vacuum pump units. Going forward, we will continue to sincerely address our customers' needs and problems, and provide products, services, and support that are suited to cutting-edge semiconductor technology.
EBARA Group aims to achieve the Sustainable Development Goals (SDGs) and further enhance its corporate value by addressing key ESG issues based on its long-term vision and medium-term management plan.
※1 Abbreviation for High Aspect Ratio Contact. The ratio of the diameter to the depth of the hole created by etching technology (Aspect Ratio: A very large AR ratio is called HARC. As semiconductor devices become more miniaturized, high-precision etching is required. *2 A process for removing unnecessary resist after etching. *3 A thin-film crystal growth technology used in semiconductor manufacturing. The growth of a new single-crystal thin film on a single-crystal semiconductor substrate.