Ebara Corporation (hereinafter referred to as "Ebara") has decided to build a new development building (tentatively named V8 Building) at the Fujisawa Plant and a new production building (tentatively named K3 Building) at the Kumamoto Plant in order to strengthen its equipment business, including CMP equipment, the main product of the Precision Machinery Company.
Expanded development and production buildings for semiconductor manufacturing equipment business.
1. Background
The semiconductor market is predicted to grow significantly due to expanding demand in the automotive, energy, and medical fields, as well as the progress of IoT and DX. The semiconductor manufacturing equipment that supports these products is being asked to evolve at an accelerated pace and to meet diverse needs in areas such as applications and manufacturing processes.
2. Overview of development and production buildings
(1) Development Building
・ Accelerating development by expanding development areas and establishing IoT networks
・ Strengthening process evaluation and proposal capabilities for customers
・ Next-generation process development utilizing cutting-edge development equipment, inspection equipment, and utility environments
| Location | 4-2-1 Hon-Fujisawa, Fujisawa City, Kanagawa Prefecture |
| Facility details | Development building for semiconductor manufacturing equipment |
| Building area | Approximately 4,300 square meters |
| Construction start date | Scheduled for October 2022 |
| Completion date | Scheduled for December 2023 |
(2) Production building
・Production capacity will be increased by more than 1.5 times compared to previous levels. Achieve further business expansion and flexible response to customer needs
・ Promote digital transformation by adopting a production system that utilizes IoT technology and establish a highly efficient production line
・ Production equipment that takes into consideration reducing the environmental impact toward a decarbonized society
| Location | 4000-1, Hino, Nankan-cho, Tamana-gun, Kumamoto Prefecture |
| Facility details | Semiconductor manufacturing equipment production building |
| Building area | Approximately 14,500 square meters |
| Construction start date | Scheduled for July 2023 |
| Completion date | Scheduled for June 2024 |
3. Future Plans
By building a new development building and a new production building, we will strengthen our development and production capabilities and further expand our business in the semiconductor industry, which is constantly changing. We will continue to take on challenges with technology that meets our customers' expectations. We will continue to contribute to the further development of the diversifying and accelerating semiconductor industry and to the "creation of an evolving and prosperous life" set out in our long-term vision, "E-Vision 2030."
EBARA Group aims to achieve the Sustainable Development Goals (SDGs) and further enhance its corporate value by addressing key ESG issues based on its long-term vision and medium-term management plan.