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Cumulative shipments of CMP equipment reached 3,000 units.

In January of this year, EBARA Precision & Electronics Company achieved a cumulative shipment of 3,000 units of CMP equipment*.

1. Background

The CMP system is a device that flattens the pattern on the silicon wafer required in units of nanometers (1 nanometer is 1/1,000,000th of a millimeter) in the manufacturing process of semiconductor chips. We have developed and shipped the world's first dry-in/dry-out CMP system. We have taken on challenges with technologies that meet customer expectations and supported the development of the diversifying semiconductor industry.

2-1 Overview

Semiconductor chips are used as the brains of electronic devices in all kinds of products, including smartphones and tablets, personal computers, home appliances, and automobiles. With the rapid development of an advanced information society, the performance of products is becoming more sophisticated and complex, and at the same time, efficiency in power consumption is required.

In December 2021, we announced the new F-REX300XA CMP system. While maintaining the reliability of conventional models, we will contribute to further productivity and yield improvement for our customers. In addition, it is a model with a low environmental impact that reduces power consumption by 10% (compared to our company) and contributes to the reduction of CO2 emissions in the supply chain.

3. Future Plans

We would like to express our gratitude to the many customers who have supported us so far and to our partner companies who have supported us in achieving a cumulative shipment of 3,000 units of CMP equipment.
Going forward, we will continue to sincerely address the issues and requests of our customers and aim to permanently provide manufacturing equipment and equipment that are compatible with cutting-edge semiconductor technology.

EBARA Group aims to achieve the Sustainable Development Goals (SDGs) and further enhance its corporate value by addressing key ESG issues based on its long-term vision and medium-term management plan.

* Chemical Mechanical Polisher