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CMP equipment F-REX300XA model announced


New CMP equipment F-REX300XA type New CMP equipment F-REX300XA type

Ebara Corporation (hereinafter referred to as Ebara) has announced the F-REX300XA CMP system, available from December 2021.

1. Background

As demand for semiconductors increases, the market is calling for higher productivity. To meet the strict technical demands of the market due to the increasing performance of devices, we have announced a new CMP system, the "F-REX300XA type."

Product overview

① Ebara's highest productivity ever
Equipped with a newly developed highly efficient transport mechanism and WPH optimization algorithm, it is possible to further improve productivity.

② High reliability, flexibility, improved yield
While maintaining our highly reliable structure with one table, one head, and dual module system, it is equipped with flexible transport, a polishing structure that reduces processing variation, and further measures against cross contamination. Contributes to improved yield.


③Low environmental impact
10% reduction in power consumption compared to the current model F-REX300X. The design was revised to reduce the number of parts. It also reduces CO2 emissions in the supply chain.

3. Future developments

Semicon West12/7-9Moscone Center (California, USA)
Semicon Japan12/15-17Tokyo Big Sight
Semicon Taiwan12/28-30Taipei Nangang Exhibition Center (Taiwan)

We will continue to take on challenges with technology that meets customer expectations, contributing to the further development of the diversifying semiconductor industry and to the "evolving, prosperous lifestyle" outlined in our long-term vision, "E-Vision 2030."

Contact for this matter
For interview requests: Corporate Planning Department, IR/PR Division ebr-pr@ebara.comopens in a new tab
For product and exhibition inquiries: Marketing Department pmc_info@ebara.comopens in a new tab

EBARA Group aims to achieve the Sustainable Development Goals (SDGs) and further enhance its corporate value by addressing key ESG issues based on its long-term vision and medium-term management plan.