EBARA Corporation (hereinafter, "EBARA") has launched a new wet exhaust gas treatment system, the G-WS type, targeting water-soluble gas treatment in the semiconductor manufacturing process since November 2021.
Model G-WS Wet Exhaust Gas Treatment System Launched
1. Background
For exhaust gas treatment in the semiconductor manufacturing process, there is a need for treatment equipment that further reduces TCO*1 and has a low environmental impact. To meet these market demands, we have launched the new G-WS wet exhaust gas treatment system, optimized for processes that use water-soluble gases.
2. Overview
①High reliability incorporating various product measures
Our unique product measures to prevent products from sticking to or stagnant in the gas flow path are combined.
Our product control technology cultivated over 10 years in the development of combustion exhaust gas treatment equipment contributes to stable operation and reduced maintenance frequency and costs.
②Low TCO and low environmental impact
Wet exhaust gas treatment equipment can be introduced at low cost. (Compared to our combustion-type exhaust gas treatment equipment)
Operation is realized with low running cost and low environmental impact because no fuel or oxygen is used.
③ Space saving
G-WS type maintenance space is front only. Flexible layout and space savings in limited sub-fab*2 space.
Product Specifications
| Model | G-WS1000 |
| Maximum treated air flow (L/min) | 1,000 |
| Maximum connected inflows | 4 |
| Dimensions (mm) | W915 x D737 x H1,727 |
| Gas to be treated | Water-soluble gases such as DCS, HCl, NH3, ClF3, TiCl4, etc. |
| Main Response Processes | Processes that mainly use water-soluble gases, such as LP-CVD (nitride film), epitaxial, metal CVD, and metal etching |
3. Future developments
We will be exhibiting panels and actual equipment at the following trade shows:
| Vacuum Exhibition | 12/1-3 | Tokyo Big Sight |
| Semicon Japan | 12/15-17 | Tokyo Big Sight |
We will continue to take on challenges with technologies that meet customer expectations and contribute to the further development of the diversified semiconductor industry and the development of the "Evolving and Affluent Lifestyle" set forth in our long-term vision, E-Vision 2030.
Contact for this matter
Product and Exhibition Inquiries: Marketing Division, IR & Public Relations Division ebr-pr@ebara.comopens in a new tab
Inquiries about products and exhibitions: Marketing Management Division pmc_info@ebara.comopens in a new tab
The EBARA Group will further enhance corporate value by addressing key ESG issues based on its long-term vision and medium-term management plan.
*1 Total Cost of Ownership
*2 Equipment floor below a clean room at a semiconductor manufacturing plant. Auxiliary equipment for exhaust gas treatment equipment first manufacturing equipment is installed.