Ebara Corporation (hereinafter referred to as "Ebara") has announced the EV-X type dry vacuum pump for medium-load processes in semiconductor manufacturing.
Dry vacuum pump EV-X type launched

1. Background
As semiconductor manufacturing technology evolves and devices become three-dimensional, dry vacuum pumps attached to etching and deposition equipment are required to have process coverage that enables stable operation in a wide range of processes, as well as compact size, energy saving performance, and just-in-time delivery. Our dry vacuum pump, the EV-X type, is a new product that applies a new design concept to the pump module and the entire package in order to meet these demands.
Product outline
①Wide range of process coverage
Thanks to the high-flow main pump and our unique by-product countermeasures, the system can handle a wide range of processes, from low gas flow processes such as ion implantation, to high gas flow processes such as epitaxial growth, and processes that generate large amounts of by-products, such as TiN film formation. It is also possible to reduce spare machine inventory and accommodate future process expansion.
②Newly developed modular design enables smaller size and shorter delivery time
A modular design optimized for manufacturing in automated factories has been adopted, shortening lead times and achieving further miniaturization. An efficient and flexible layout is possible for sub-fab space, which is becoming increasingly strained as the number of equipment and chambers increases.
3) Reduction in TCoO
Our unique rotor design and energy-saving technology have achieved 25-50% lower power consumption compared to our current models. Contributes to reducing CO2 emissions. In addition, optimal temperature control for each process improves process resistance. Extending the replacement cycle of parts contributes to reducing TCoO.
Product Specifications
Model | EV-X100N | EV-X200N | EV-X300N |
Maximum pumping speed (L/min) | 10,000 | 20,000 | 30,000 |
Ultimate pressure (Pa) | 0.5 | 0.5 | 0.5 |
Power specifications | 3 phase 200-220V (50/60Hz) | 3-phase 200-220V (50/60Hz) | 3-phase 200-220V (50/60Hz) |
Power consumption at arrival (kW)* | 0.9 | 1 | 1.5 |
3. Future developments
Semicon Japan | 12/15-17 | Tokyo Big Sight |
Semicon Taiwan | 12/28-30 | Taipei Nangang Exhibition Hall 1 |
We will continue to take on new challenges with technology that meets our customers' expectations, contributing to the further development of the diversifying semiconductor industry and to the "evolving and enriching lifestyles" outlined in our long-term vision, "E-Vision 2030."
Contact for this matter
For interview requests, please contact the IR/Public Relations Division, Corporate Planning Department ebr-pr@ebara.comopens in a new tab
Inquiries regarding products and exhibitions pmc_info@ebara.comopens in a new tab
The EBARA Group will address key ESG issues based on its long-term vision and medium-term management plan, aiming to achieve the Sustainable Development Goals (SDGs) and further increase its corporate value.