Ebara Corporation (hereinafter referred to as "Ebara") has announced the RJ-SA type precision chiller for the semiconductor manufacturing process. The product is scheduled for release in January 2022.
Released the RJ-SA precision chiller for semiconductor manufacturing.
1. Background
Amid the rapid development of an advanced information society, the load on semiconductor manufacturing processes is increasing, along with an increase in the number of equipment, the number of chambers per equipment, and the number of sub-fab* devices attached to manufacturing equipment. There is an increasing demand in the market for compact, high-output chillers that enable efficient use of sub-fab space. We have developed the RJ-SA model, a small, high-output chiller specifically tailored to meet our customers' needs, and will be expanding it both domestically and overseas.
Product outline
①Compact and high output
By using Ebara's original small pump SSPD type, a small footprint is achieved
Although small, it has a high output of 4.0 kW cooling capacity, supporting efficient use of sub-fab space
②Compatible with non-flammable low GWP refrigerant R448A
Compatible with low GWP refrigerant (GWP: 1380). Low environmental impact and reduced risk of leakage.
3) Temperature control accuracy: +/- 0.1℃
Supports high precision temperature control. Contributes to improved process stability and yield
| Temperature control range | -20℃~30℃ |
| Temperature control accuracy | +/- 0.1℃ |
| Cooling capacity (50Hz/60Hz) | 4.0kW |
| External dimensions (W x D x H, mm) | 368 x 947 x 1,097 |
| Manufacturer/seller | Ebara Refrigeration Systems Co., Ltd. |
3. Future developments
| 2021 | ||
| JASIS | 11/8-10 | Makuhari Messe |
| INCHEM TOKYO 2021 | 11/17-19 | Tokyo Big Sight |
| Vacuum Exhibition | 12/1-3 | Tokyo Big Sight |
| INTERPHEX | 12/8-10 | Makuhari Messe |
| Semicon Japan | 12/15-17 | Tokyo Big Sight |
| 2022 | ||
| HVAC&R 2022 | 2/1-2/4 | Tokyo Big Sight |
We will continue to take on new challenges with technology that meets our customers' expectations, and contribute to the further development of the diversifying semiconductor industry and to the "evolving and prosperous lifestyle" outlined in our long-term vision, "E-Vision 2030."
【Contact for this matter】
Interview requests: Corporate Planning Department, IR/Public Relations Division ebr-pr@ebara.comopens in a new tab
Marketing Division pmc_info@ebara.comopens in a new tab
*The underfloor environment in a semiconductor manufacturing factory. Its role is to create a clean environment required for the manufacturing equipment process and to treat exhaust gases generated during the manufacturing process.
The EBARA Group will address key ESG issues based on its long-term vision and medium-term management plan, aiming to achieve the Sustainable Development Goals (SDGs) and further increase its corporate value.