EBARA Precision Machinery Europe (headquartered in Germany, hereinafter referred to as EPME), an overseas group company of Ebara Corporation (hereinafter referred to as Ebara), has built a dry vacuum pump overhaul factory in Dresden, Germany, and started operations in April. This factory is EPME's second dry vacuum pump overhaul factory.
Dresden dry vacuum pump overhaul factory begins operation

1. Overview of the overhaul factory
EPME sells and services dry vacuum pumps, turbo molecular pumps, CMP equipment used in chip manufacturing in semiconductor manufacturing, and exhaust gas treatment equipment used in the chemical industry, etc., primarily in the European market. Our base in Dresden, Germany's IT city also known as Silicon Saxony, is home to many of Germany's major semiconductor manufacturers, and will play a central role in our precision electronics business in the European market.
Location | Dresden, Germany |
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Site area | 800 m2 (factory), approx. 100 m2 (office) |
Investment cost | Approx. 1.6 million euros |
Facility contents | Overhaul of dry vacuum pumps |
Start of operation | April 2021 |
In addition, with consideration for environmental conservation, the overhaul factory has introduced LED lighting, including in the office, and is considering installing solar panels in the future.
3. Future developments
By strengthening after-sales service for semiconductor manufacturing equipment and devices through the operation of the new overhaul factory, the Ebara Group will respond to the growing global demand for semiconductors and contribute to the smartification of society as outlined in the company's long-term vision, "E-Vision 2030."
By addressing key ESG issues based on its long-term vision and medium-term management plan, the Ebara Group aims to achieve the Sustainable Development Goals (SDGs) and further improve its corporate value.