On October 20, Ebara Corporation (hereinafter referred to as Ebara) held an online symposium on post-CMP cleaning entitled "The 4th Ebara Open Innovation Symposium on Post CMP Cleaning Technology," inviting prominent Japanese professors.
The 4th EOI Symposium on Post-CMP Cleaning Technology was held
1. Background and Objectives
EBARA is expanding its EHU※1 activities to develop human resources who will support technological development. This EOI※2 symposium, which is one of the technical human resource development programs implemented by EHU, is positioned as "a place for industry-academia collaboration co-creation that connects academia and business beyond technical fields."
With the progress of miniaturization in semiconductor devices, the importance of post-CMP cleaning and the demand for high cleanliness are increasing. In order to achieve a high level of cleanliness, it is considered important not only to correctly understand the cleaning mechanism and fundamentally reexamine and evolve existing cleaning methods, but also to challenge new cleaning methods.
The purpose of this symposium is to contribute to Ebara's technological development by allowing researchers and engineers in the field to share and recognize information through explanations and discussions of each research result.
2-1 Overview
Four professors and over 110 employees participated in this symposium. In the three sessions, lectures were given mainly by professors on the fundamentals and applications of CMP cleaning chemistry and surface and interface technologies. Afterwards, participants shared their research questions and issues they face in the field in a roundtable discussion format, and new hypotheses were proposed and lively discussions were held.
3. Future developments
Ebara's EHU will continue to hold lectures and seminars by domestic and international researchers, including professors with whom it has ties through joint research at EOI, in order to strengthen product competitiveness, improve technological capabilities, and create new businesses.
By addressing key ESG issues based on its long-term vision and medium-term management plan, the Ebara Group aims to achieve the Sustainable Development Goals (SDGs) and further improve its corporate value.
【Event History】
※ 1. EHU (Ebara Hi-tech University)
An initiative to promote the improvement of the skills of researchers and engineers and the creation of new research ideas by learning cutting-edge knowledge and technology.
※ 2. EOI (Ebara Open Innovation)
A unique form of open innovation in which young researchers are trained within external research institutions while conducting joint research to solve advanced technological problems.