Completion of Precision Component Development and Innovation Center at Fujisawa Plant
EBARA Corporation (hereinafter referred to as "EBARA") held a ceremony for the completion of the Precision Component Development and Innovation Center Building V6, a new experimental and development facility for testing and developing dry vacuum pumps and exhaust gas treatment equipment, which are the main products of the Precision & Electronics Business Company. Full-scale operation is scheduled to begin on October 1.
1. Background and Objectives
Against the backdrop of the spread of IoT and AI, semiconductors are used in all kinds of things, and the demand in the industrial field is rapidly increasing, and the semiconductor manufacturing equipment market is expanding. In addition, the demand for dry vacuum pumps and exhaust gas treatment equipment is diversifying in advanced R&D facilities, analytical equipment, and medical equipment. EBARA will build development facilities and systems to efficiently respond to the diverse needs of customers.
2-2 Features
- Floor space and the number of test benches (test stands) more than doubled compared to conventional laboratory equipment
- Installation of process gas introduction and treatment equipment that reproduces the customer's usage environment
- Demo room set up for customers to check the operation and operation of the new product
- Consolidation of dry vacuum pump and exhaust gas treatment equipment development facilities in one location
- Adoption of a test data measurement system that utilizes IoT technology
- A social space where employees can be expected to concentrate, come up with creative ideas, and revitalize communication
3. Future developments
By improving the efficiency of the development of dry vacuum pumps and exhaust gas treatment equipment and speeding up, we will continue to introduce products that meet customer requirements to the market in a timely manner. In addition, we will promote the development of exhaust systems that integrate dry vacuum pumps and exhaust gas treatment equipment, for which demand is increasing from various fields.
This facility will be a place for active communication and innovation both inside and outside the company in the rapidly changing semiconductor industry.
2-1 Overview
| Location | Kanagawa Prefecture Fujisawa City Honfujisawa 4-2-1 |
|---|---|
| Facilities | Development and testing facilities for dry vacuum pumps and exhaust gas treatment equipment |
| Building area | Approx. 2,245 square meters, 2 floors above ground |
| Cost of construction | Approximately 1.0 billion yen |
By addressing our medium-term management plan and key ESG issues, the EBARA Group aims to achieve our management policies and further increase our corporate value, thereby contributing to the Sustainable Development Goals (SDGs).
