Launch of new exhaust gas treatment systems TND-Single and TND-Single Plus
In November 2019, EBARA Corporation (hereinafter referred to as "EBARA") began selling the TND-Single (combustion + wet) and TND-Single Plus (wet + combustion + wet) exhaust gas treatment systems for the semiconductor manufacturing process.
1. Background and Objectives
In today's world, where communication and robot technologies are rapidly evolving with the evolution of IoT and AI, there is a growing demand for higher efficiency in exhaust gas treatment and longer maintenance intervals due to product countermeasures in semiconductor manufacturing processes. EBARA has developed a new series of exhaust gas treatment systems that are tailored to customer needs, and will continue to develop highly reliable EBARA brands mainly in Japan, North America, and Taiwan.
2-2 Features
(1) By installing a new burner, we have achieved high-efficiency combustion with less thermal energy loss, as well as low NOx and low CO.
(2) The automatic sediment removal function, wet wall formation function, and tank stirring function extend the maintenance interval (about 3 times ~ 6 times more than our conventional products*1).
(3) By adding a wet processing section to the front stage of the burner to remove process gases that generate a large amount of products such as SiN and TiN in advance, the amount of powder generated inside the burner is greatly reduced.
4．Lineup
| model | Maximum Gas Number of inlets | Maximum gas inflow (L/min) *2 | Dimensions W x D x H (mm)*3 | Fuels |
|---|---|---|---|---|
| TND-Single | 4 | 200 (per port) 400 (per burner) | 1200 x 650 x 1980 | City Gas or propane gas |
| TND-Single Plus | 2 |
*1 Values are based on comparison with our conventional products under the same conditions. It may vary depending on the conditions.
*2 Subject to change depending on conditions.
*3 Only the chassis does not include the piping to which it is connected.
3. Future developments
EBARA will exhibit TND-Single and TND-Single Plus panels at SEMICON Japan in December 2019.
【SEMICON Japan 2019 】http://www.semiconjapan.org/jp/opens in a new tab
For inquiries about the new TND series, click here.
EBARA will continue to take on challenges with technologies that meet customer expectations and contribute to the further development of the diversifying semiconductor industry.
※ "The 'XXX type' designation is our model code."
