Received the Chairman's Prize from the Invention Society for its patents related to high-temperature homogenization structure of vacuum pumps

November 14, 2019
EBARA Corporation

EBARA Corporation (hereinafter referred to as EBARA) has obtained a patent related to the high-temperature uniform heat structure of a vacuum pump. ^*1 As a result, we were awarded the "Japan Institute of Invention and Innovation Chairman's Award" at the 2019 Kanto Region Invention Awards, sponsored by the Japan Institute of Invention and Innovation. In addition to the main award, six Invention Encouragement Awards were also awarded this year. ^*2 He has won awards. The award ceremony was held in Tokyo on Wednesday, November 13th.

The Regional Invention Awards divide the country into eight regions and recognize engineers and researchers who have contributed to outstanding inventions, their implementation, and their guidance, encouragement, and development in each region. It was established in 1921 with the aim of contributing to the improvement of science and technology and the development of industry. The award was presented in recognition of EBARA's dry vacuum pumps, which are used in the manufacturing processes of semiconductors and liquid crystal displays, for their technology of suppressing the generation of solid matter by uniformly heating the pump at high temperatures.

Gases exhausted during semiconductor and other manufacturing processes contain components that tend to solidify in the low temperature parts of the pump. In the past, the pump was raised by installing a heater to prevent the pump from stopping operation due to solids. In this invention, a plurality of heat transfer materials are inserted into the pump casing, and the shapes of the pump room intake side and exhaust side are devised. This allows the gas compression heat (self-heating) generated during pump operation to spread throughout the pump room, and the entire pump room to be soaked at high temperatures. This technology suppresses the generation of solids inside the pump without using an expensive heater, enabling the pump to operate stably for a long period of time while also contributing to reducing power consumption.

EBARA's dry vacuum pumps are used both domestically and internationally in the manufacturing processes of semiconductors, liquid crystal displays, and other products, and hold the second largest market share in the world. EBARA will continue to take on the challenge of developing dry vacuum pumps tailored to customer needs and promote the highly reliable EBARA brand worldwide.
[Reference] Name of invention: Vacuum pump (Patent registration number 5793004, applied for in 2011, registered in 2015)

[List of award winners]
*1 Chairman's Award from the Japan Institute of Invention and Innovation
"Vacuum pump high temperature uniform heat structure"
*2 Encouragement Award
"Motor pump"
"Substrate polishing pressure control device"
"Water supply equipment"
"Boost Water Supply System"
"Radioactive iodine adsorption technology"
"Unit silencer"

[Reference URL] Japan Institute of Invention and Innovation, Kanto Region Invention Awards 2019
http://koueki.jiii.or.jp/hyosho/chihatsu/R1/jusho_kanto/index.htmlopens in a new tab

The EBARA Group will work on its medium-term management plan and key ESG issues to further increase its corporate value based on its management policy and contribute to the achievement of the Sustainable Development Goals (SDGs).