Dry vacuum pump Fujisawa factory reaches cumulative shipment of 150,000 units
2018.05.30
EBARA CORPORATION

Ebara Corporation (hereinafter referred to as "Ebara") Precision Machinery Company achieved cumulative shipments of 150,000 dry vacuum pumps from its Fujisawa Factory in May of this year. This achievement comes 32 years after the shipment of the first unit in 1986.
Until the 1980s, oil rotary pumps were the mainstream vacuum pumps used in semiconductor manufacturing processes, but as higher integration increased, the need for cleaner vacuum environments increased, so we applied our core competence in rotary machinery technology to commercialize a dry vacuum pump that does not use sealing liquid in the gas-contacting parts. Our dry vacuum pumps not only create a clean vacuum, but also feature a non-contact seal structure, which reduces the frequency of maintenance. Taking advantage of these features, applications are now expanding beyond semiconductor and display manufacturing to a wide range of industries, including solar cells, LEDs, lithium-ion secondary batteries, and various analytical equipment.
Based on the measures of its medium-term management plan (E-Plan 2019), EBARA will launch a fully automated factory for dry vacuum pumps by 2019, dramatically improving production efficiency, and will also deepen cooperation with overseas production bases to continue meeting the demand of the robust semiconductor market and the requests of customers in a wide range of fields.
"History of Dry Vacuum Pumps"
1985 | Start of development of dry vacuum pumps |
1986 | Sales of Roots-type dry vacuum pumps begin |
1989 | Completion of V2 factory, mass production factory for dry vacuum pumps |
1991 | Sales of standard package machine A type begin |
1994 | Fujisawa factory cumulative shipments reach 10,000 units |
1995 | Sales of energy-saving dry vacuum pump AA type begin |
1997 | AAS-type screw-type dry vacuum pump for heavy-load processes launched |
1998 | AA70W wins Nikkan Kogyo Shimbun's Machine Industry Design Award "Japan Industrial Machinery Manufacturers Association Award" |
2000 | AA-type wins Japan Machinery Federation's "Minister of Natural Resources and Energy Award" for excellent energy-saving equipment in 1999 |
2003 | ESR-type energy-saving dry vacuum pump launched |
2004 | EST-type screw-type dry vacuum pump for heavy-load processes launched ESA-type roots pump for large-flow exhaust launched |
2007 | ESR type won the Japan Machinery Federation's 2006 Excellent Energy Saving Equipment "Japan Machinery Federation Chairman's Award" |
2009 | Energy saving dry vacuum pump EV-S type launched Air-cooled small dry vacuum pump PDV type launched |
2011 | Energy saving dry vacuum pump EV-M type launched for heavy load process Fujisawa factory reaches cumulative shipment of 100,000 units |
2012 | Air-cooled dry vacuum pump EV-A type launched |
2013 | Sales of energy-saving air-cooled dry vacuum pump EV-SA for measuring instruments launched |
2016 | Sales of energy-saving dry vacuum pump EV-L for light-medium load processes launched |
2018 | Fujisawa factory cumulative shipments reach 150,000 units |
