Establishment of a new experimental development building in Fujisawa
2018.11.13
EBARA Corporation

At the end of June 2019, EBARA Corporation (hereinafter referred to as "EBARA") will construct a new experimental and development building, V6, to conduct experiments and development of dry vacuum pumps and exhaust gas treatment equipment, which are the main products of the Precision & Electronics Business Company. It will be more than twice the area of conventional experimental facilities. A groundbreaking ceremony was held on October 31 for the construction of the building.
1. Background and Objectives
Against the backdrop of the spread of IoT and AI, semiconductors are used in all kinds of things, and the demand in the industrial field is rapidly increasing, and the semiconductor manufacturing equipment market is expanding. In addition, the demand for dry vacuum pumps and exhaust gas treatment equipment is diversifying in advanced R&D facilities, analytical equipment, and medical equipment. We will build development facilities and systems to efficiently respond to the diverse needs of our customers.
2. Features of Building V6
- Floor space and the number of test benches (test stands) more than doubled compared to conventional laboratory equipment
- Installation of process gas introduction and treatment equipment that reproduces the customer's usage environment
- Demo room set up for customers to check the operation and operation of the new product
- Consolidation of dry vacuum pump and exhaust gas treatment equipment development facilities in one location
- Adoption of a test data measurement system that utilizes IoT technology
3. Future developments
By improving the efficiency of the development of dry vacuum pumps and exhaust gas treatment equipment and speeding up, we will continue to introduce products that meet customer requirements to the market in a timely manner. In addition, we will promote the development of exhaust systems that integrate dry vacuum pumps and exhaust gas treatment equipment, for which demand is increasing from various fields.
4. Outline of the V6 Building Plan
location | Kanagawa Prefecture Fujisawa City Honfujisawa 4-2-1 |
Facilities | Development and Laboratory of Dry Vacuum Pumps and Exhaust Gas Treatment Equipment |
Building area | Approx. 2,245 square meters |
Start of construction | November 2018 |
Completion time | Scheduled for the end of June 2019 |
Cost of construction | Approximately 1.0 billion yen |
EBARA will continue to provide high-performance semiconductor manufacturing equipment that meets customer needs and expand its service and support system to flexibly respond to customer needs and expand its business in the rapidly changing semiconductor industry.