Announcement of SEMICON Japan 2018 Manafort Exhibit
2018.11.19
EBARA CORPORATION
EBARA will be exhibiting at SEMICON Japan 2018 from December 12 to 14 at Tokyo Big Sight.
Small, energy-saving air and water-cooled dry vacuum pumps such as the portable EV-PA, exhaust gas treatment systems that achieve even higher flow rates, CMP systems that achieve ultra-miniaturization of semiconductors, plating systems that are essential for cutting-edge packaging technologies such as Fan-out, and bevel polishing systems that remove defects in wafer end surfaces that can cause yield loss.
Visit our booth on the day of the event.
| Name | SEMICON Japan 2018 https://www.semiconjapan.org/enopens in a new tab |
|---|---|
| Date | 2018/12/12 (Wed) -14 (Fri) 10:00-17:00 (common for 3 days) |
| Venue | Tokyo Big Sight (Koto-ku, Tokyo) |
| Organizing | SEMI |
| Booth No. | East Exhibition Hall, East Hall 4 (Booth No. 4344) |
| Exhibits (* There is an actual machine on display) | ・Dry vacuum pumps (model EV-A10, model EV-M*, model EV-S*, model ESA, model EV-PA (NEW)*, model EV-SA, model EV-L*) ・Exhaust gas treatment equipment (model G5, model G6, Dry vacuum pump + exhaust gas treatment equipment integrated system) ・CMP equipment ・Plating equipment ・Bevel polishing equipment ・Ozone water generation equipment, etc. |