Launch of new air-cooled dry vacuum pumps Compact and lightweight EV-PA for general industrial applications
2018.12.10
EBARA Corporation
In December 2018, EBARA Corporation (hereinafter referred to as "EBARA") began selling the EV-PA model, a new user-friendly air-cooled dry vacuum pump that creates a cleaner vacuum environment for vacuum exhaust applications in the analysis, medical, food, and coatings industries.
1. Background and Objectives
In the analytical, medical, food and coatings industries, which are targeted by this new product, there is a growing demand for a clean vacuum environment and a reduction in the frequency of maintenance of vacuum pumps.
EBARA has developed new products that meet the needs of customers in the analysis, medical, food, and coatings industries by utilizing its unique dry vacuum pump technology cultivated in the semiconductor industry, which has strict requirements for vacuum quality and pump maintenance intervals.
2. Features
- There is no backflow of oil and water to the vacuum side.
- Non-contact seals are adopted, and there is no need to replace seals, and maintenance intervals are long.
- The only utility required is a power supply.
- It is extremely lightweight and easy to move with a weight of 9 kg ~ 21 kg, and can be used in a wide range of applications*1.
- Compatible with CE mark, NRTL and SEMI S2. (Can also be used overseas)
- There are three models with an exhaust speed of 50~500L/min.
Future developments
The sales target is 1,000 units per year in 2019 and 10,000 units per year in the future.
EBARA will further focus on developing products and services that contribute to improving customer productivity and reducing total costs.
Lineup
| model | pumping speed*2 (L/min) | ultimate pressure*2 (Pa) | Maximum pressure*2 Power Consumption (W) | Dimensions: WxLxH*3 (mm) |
|---|---|---|---|---|
| EV-PA 50 | ５ | ５ | ５ | 175 x 238 x 192 |
| EV-PA 250 | ５ | 1.37 | ５ | 189 x 482 x 253 |
| EV-PA 500 | ５ | 1.37 | ５ | 189 x 482 x 272 |
*1 Not suitable for applications that generate corrosive or explosive gas exhaust or reaction by-products. Gas ballast is required for the evacuation of condensable or moisture-laden gases.
*2 The figures in the table above are the values when gas ballast is not used.
*3 The dimensions in the above table are the dimensions of the housing (including the legs) and do not include the intake and exhaust ports and handles.
By working on the Medium-Term Management Plan and key ESG issues, the EBARA Group will contribute to the Sustainable Development Goals (SDGs) by achieving its management policy and further enhancing its corporate value.
EBARA will introduce its new air-cooled dry vacuum pump EV-PA at Semicon Japan 2018, which will be held at Tokyo Big Sight from December 12.
* The display of "○○○ type" is our model code.
