2016.03.25
EBARA Corporation
Groundbreaking Ceremony Held for Kumamoto Plant Expansion
On March 24, EBARA Corporation (hereinafter referred to as "EBARA") held a groundbreaking ceremony for the expansion of its Kumamoto Plant. At the groundbreaking ceremony, guests from Kumamoto Prefecture and Minamiseki Town were invited to pray for construction safety.
EBARA opened Kumamoto Works in 2001 as a mass production plant for CMP systems. The expansion will involve the construction of a new factory expansion and a new service factory on the same scale as the existing factory at the Kumamoto Plant, which is scheduled to begin operations in December 2016.
Outline of New Plant Plan
| (1) Outline of Kumamoto Plant | |
| Location | 4000-1 Koei, Nankan-machi, Tamana-gun, Kumamoto Prefecture |
| Site area | Approximately 140,000 square meters |
| (2) Overview of the new factory plan | |
| Facility description | Production of semiconductor manufacturing equipment and service and support for dry vacuum pumps |
| Building area | Approx. 12,000 sq.m. |
| Start of construction | March 2016 |
| Scheduled to start operation | December 2016 |
| Amount of investment | Approximately 6.8 billion yen |
About the new plant
The new plant will be a highly flexible production facility that can accommodate the production of a variety of semiconductor manufacturing equipment, including CMP equipment, which is our main production model. A new service factory will also be established as a base for overhauling dry vacuum pumps, mainly in the Kyushu and Chugoku regions.