2016.03.31
EBARA Corporation
30th anniversary of precision and electronics business
EBARA Corporation (hereinafter referred to as "EBARA")'s precision machinery and electronics business celebrated its 30th anniversary in fiscal 2015 since its launch. We are already well on our way to the next 30 years.
Since our launch as one of our headquarters divisions in 1985, we have consistently provided what our customers want in the semiconductor-related market, quickly and reliably.
Since the invention of the transistor in 1947, semiconductor technology has continued to develop for over 60 years, based on IBM Dennard's Miniaturization Law P*1 and Intel's Moore's Law P*2. The semiconductor-related market will continue to expand and will remain at the top of the high-tech industry. We will continue to work hard to develop our precision and electronics business together with our customers, so that we can celebrate our next 30th anniversary.
[Precision and electronics business history]
| 1985 | Start of development of dry vacuum pumps and turbo molecular pumps |
| 1986 | Shipped the first dry vacuum pump (Roots type ERD/UERR type) |
| 1992 | Shipped the first CMP machine |
| 1995 | Released the Roots type dry vacuum pump AA type (first energy-saving type) |
| 2001 | Shipped the UFP300 type mounting plating equipment for 300 mm wafers |
| 2004 | Bevel polishing machine EAC200bi/300bi type launched |
| 2008 | Combustion type exhaust gas treatment device G5 type launched (combustion type third generation) |
| 2012 | 300mm wafer CMP F-REX300S2 type (third generation F-REX) launched |
*1 A law proposed by IBM's Robert Dennard about increasing the speed of integrated circuits
*2 A law proposed by Intel's Gordon Moore about the density of semiconductor chips
* The 'XXX type' designation is our model code