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Construction of new Kumamoto Plant completed


2016.12.05
EBARA Corporation

EBARA Corporation (EBARA) completed construction on November 15 of a new precision and electronic production plant that was under construction at the Kumamoto Plant and a service plant that serves as an overhaul base for dry vacuum pumps.
The new plant is roughly the same size as the existing plant, and it is a highly flexible production facility for the production of CMP equipment, the main production model, and other semiconductor manufacturing equipment. In addition, we will work to reduce the environmental impact and harmonize with the surrounding environment by halving the electricity used for air conditioning in clean rooms and reusing more than 95% of the water used in the production process.

With the completion of the new plant, and Kumamoto Factory will be able to increase the production capacity of the equipment by up to twice as much as the conventional one. At the same time, we will be able to respond flexibly to customer needs and delivery times, and to further flexibly operate the production including the precise and Fujisawa Factory. As planned, we expect to contribute to production from next year, and will continue to meet steady demand for CMP equipment.
and service plants have overhaul processing capacity that is more than three times higher than the existing Kyushu service plants, and will become the overhaul base for dry vacuum pumps centered on Kyushu and Chugoku regions.

Demand expansion in the automotive, energy, and medical sectors, as well as the progress of Internet-connected IoT (Internet of Things) for all things, the semiconductor market is expected to grow steadily in the future. On the other hand, the semiconductor manufacturing equipment that supports them is required to respond to diverse needs such as applications and manufacturing processes.
EBARA will continue to provide highly functional semiconductor manufacturing equipment that meets the needs of customers and expand its service and support system. In the rapidly changing semiconductor industry, EBARA will flexibly respond to customer needs and expand its business.

New plant in Kumamoto New plant in Kumamoto
Service plant Service plant

[Outline of new plant]

(1) Kumamoto Office Overview
Location: Kumamoto Prefecture Tamana-gun Nanseki-cho Hiboi 4000-1
Site area: Approximately 140,000 square meters
(2) New plant Overview
Facility description: Production of semiconductor manufacturing equipment and service & support of dry vacuum pumps
Floor area (built-up area): Approximately 12,000 square meters
Completion: November 15, 2016
Investment amount: Approximately 6.8 billion yen