2016.12.07
EBARA Corporation
Started sales of new dry vacuum pump Model EV-L for semiconductor industry applications
In January 2017, EBARA Corporation (hereinafter referred to as "EBARA") will start selling a new water-cooled dry vacuum pump, Model EV-L, for the semiconductor industry.
Model EV-L is a dry vacuum pump ideal for medium-load applications such as metal/poly etching. With the launch of the EV-L model, the company has added the EV-S model for light-load applications (load lock rooms, inspection equipment, PVD equipment, etc.) and the EV-M model for heavy-load applications (deposition equipment, etc.) currently available to its lineup of dry vacuum pumps that are ideal for all applications from light-load to heavy-load.
Model EV-L is a compact, low-power consumption product that uses corrosion-resistant materials as standard and has a temperature profile optimized for the application.
EBARA will continue to focus on the development of products and services that contribute to customers' productivity improvement and total cost reduction.
[EBARA Model EV-L lineup]
| Model | Exhaust speed | Ultimate Pressure | Power Consumption (When operating at ultimate pressure) | Dimensions (WxLxH mm) *1 |
|---|---|---|---|---|
| EV-L20N | 2000 L/min | 2.0 Pa | 0.65 kW | 280 x 635 x 320 |
| EV-L100N | 10000 L/min | 0.5 Pa | 0.9 kW | 380 x 647 x 655 |
| EV-L200N | 18000 L/min | 0.5 Pa | 1.0 kW | 380 x 772 x 655 |
- *1)The dimensions in the table above are those of the housing (including casters) and do not include the intake and exhaust ports.
- Note) "○○○ type" is our model symbol.
