There was an acceleration in the enhanced performance and miniaturization of semiconductor devices.
Utilizing pump technology acquired in our Fluid Machinery & Systems Business, we developed vacuum pumps for semiconductors.
The following year, 1986, we delivered the first Roots type dry vacuum pump.

We developed gas abatement systems to detoxify harmful gases generated in manufacturing processes, such as greenhouse gases and toxic gases, and solve ongoing environmental problems caused by harmful emissions.

EBARA began its development of CMP systems to support the miniaturization and multilayering of semiconductors, allowing for ever smaller electronic devices and plant machinery.